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テクノメイトロゴマーク 株式会社テクノメイト Technomate CO.,LTD

High-pressure pump

SSBL series

SSBL series
pump unit / high-pressure pump

    Product Summary
    Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.
    Use
    Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning

specification

  • Model

    SSBL series

  • Discharge pressure

    SSBL-20 : 0.98~9.8MPa
    SSBL-30 : 1.47~14.7MPa
    SSBL-37.5 : 1.76~17.6MPa

  • The discharge flow rate

    SSBL-20 : 1.13L/min
    SSBL-30 : 0.71L/min
    SSBL-37.5 : 0.58L/min

  • Driving air pressure

    0.05~0.5MPa

  • Air consumption

    About 70L (when the pump stroke number 60SPM)

  • Wetted seal

    Pure water, IPA · · · FKM
    NMP · · · Kalrez

Catalog PDF documents
(External site IPROS)
FSBL50

FSBL50
pump unit / high-pressure pump unit

specification

Catalog PDF documents
(External site IPROS)
KPW series

KPW series
pump unit / high-pressure pump unit

specification

Catalog PDF documents
(External site IPROS)
KPM-40B

KPM-40B
pump unit / high pressure pump unit

specification

Catalog PDF documents
(External site IPROS)
KPM-5030

KPM-5030
pump unit / high pressure pump unit

specification

Catalog PDF documents
(External site IPROS)