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テクノメイトロゴマーク 株式会社テクノメイト Technomate CO.,LTD

Chemical liquid supply device

Chemical liquid supplying apparatus

Chemical liquid supplying apparatus P112
Control of temperature and fluid / Chemical liquid supply device

    Product Summary
    It is used to supply chemical liquid of a predetermined concentration to the CMP apparatus, and It has the function of supplying 2 lines of 2 kinds.
    Use
    Semiconductor manufacturing equipment

specification

  • Model

    P112

  • Diluted solution

    NH40H、H2O2、HF、DIW

  • Flow row rate used

    2.2L/min max 2LINES

  • Dilution time

    1 min/2.2L

  • Supply pressure

    0.2MPa max

  • Power supply

    Single-phase
    100V~240V±10%、15A

canister unit P82

canister unit P82
Control of temperature and fluid / Chemical liquid supply device

    Product Summary
    Acid type 2, alkaline type 1 undiluted liquid containers are stored, and undiluted liquid is supplied by pressurized pressure feed by N 2
    Use
    Stock supply of the CMP apparatus

specification

  • filter

    Capsule filter 0.1 micron made of polysulfone

  • The chemical

    Acid-based H2O2, HF alkali-based NH4OH

  • valve

    Air operated valve PTFE

  • exhaust

    Dampers, manometer built

Catalog PDF documents
(External site IPROS)
Additives dropping device P101

Additive dropping device P101
Control of temperature and fluid / Chemical liquid supply device

    Product Summary
    This device is a device for mixing an additive to cutting water
    Use
    Dicing machine

specification

  • Model

    P10A

  • DIW

    1~5L/min

  • Additives adjustment range

    2.4~12mL/min