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テクノメイトロゴマーク 株式会社テクノメイト Technomate CO.,LTD

Ultrapure water heating unit

Ultrapure water heating unit HDW-III

Ultrapure water heating unit HDW-III
Control of temperature and fluid / Ultrapure water heating unit

    Product Summary
    It is a unit that can efficiently warm ultrapure water by using carbon heater and adopt long life heaters.
    Use
    Si wafer, GaAs wafer cleaning, liquid crystal display cleaning, mask cleaning, cleaning of hard disk substrate.

specification

  • Model

    HDW-III Series 4 Models
    (-12N, -18N, -24N, -36N)

  • Standard flow rate ※

    12L/min~38L/min

  • Maxium set temparature ※

    85℃

  • Power supply
    (Heater)※

    3 Phase AC200V 150A~225A

  • Power supply
    (Control)

    Single-phase AC200V 5A

  • Number of heaters ※

    2~6

※ It depends on model