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テクノメイトロゴマーク 株式会社テクノメイト Technomate CO.,LTD

Vacuum pump unit

P94 (1.5kw)

P94 (1.5kw)
pump unit / vacuum pump unit

    Product Summary
    It is used as a vacuum generating device for wafer vacuum chuck of dicing machine, and it consists of water sealing pump, control valve seal water flow meter, vacuum pressure gauge, etc.
    Use
    Vacuum chuck for dicer

specification

  • Model

    P94 (1.5w)

  • Motor output

    1.45kW/1.85kW(50/60Hz)

  • Ultimate pressure

    40Pa

  • Exhaust speed

    48㎥/h 、59㎥/h (50/60Hz)

  • Port size

    25mm

  • Water supply amount

    3.83L/min、 0.2~0.5MPa

  • weight

    About 50kg

  • External dimensions

    D484×H218×W186

  • Noise levels

    65dB/69dB (50/60Hz)

  • Power-supply voltage

    185 ~ 220V 3-phase Δ connection

  • Rated current

    6.4A/8.2A (50/60Hz)

  • Ambient temperature

    40℃

Catalog PDF documents
(External site IPROS)
P97 (3.0kw)

P97 (3.0kw)
pump unit / vacuum pump unit

    Product Summary
    It is used as a vacuum generating device for wafer vacuum chuck of dicing machine, and it consists of water sealing pump, control valve seal water flow meter, vacuum pressure gauge, etc.
    Use
    Vacuum chuck for dicer

specification

  • Model

    P97 (3.0kw)

  • Motor output

    3.0kW(50Hz)/3.45kW(60Hz)

  • Ultimate pressure

    3.3kPa

  • Exhaust speed

    78㎥/h(50Hz)/92㎥/h(60Hz)at40kPa

  • Port size

    Φ38.1mm (Rc11 / 2 inch) IN · OUT both

  • Water supply amount

    4.67L/min (maximum supply pressure 1.1MPa)

  • weight

    About 60kg

  • External dimensions

    D556×H236×W225

  • Noise levels

    66dB/71dB (50/60Hz)

  • Power-supply voltage

    185 ~ 220V 3-phase Δ connection

  • Rated current

    14.5A/14.5A (50/60Hz)

  • Ambient temperature

    40℃