Vacuum pump unit
P94 (1.5kw)
pump unit / vacuum pump unit
- Product Summary
- It is used as a vacuum generating device for wafer vacuum chuck of dicing machine, and it consists of water sealing pump, control valve seal water flow meter, vacuum pressure gauge, etc.
- Use
- Vacuum chuck for dicer
specification
-
Model
P94 (1.5w)
-
Motor output
1.45kW/1.85kW(50/60Hz)
-
Ultimate pressure
40Pa
-
Exhaust speed
48㎥/h ､59㎥/h (50/60Hz)
-
Port size
25mm
-
Water supply amount
3.83L/min､ 0.2～0.5MPa
-
weight
About 50kg
-
External dimensions
D484×H218×W186
-
Noise levels
65dB/69dB (50/60Hz)
-
Power-supply voltage
185 ~ 220V 3-phase Δ connection
-
Rated current
6.4A/8.2A (50/60Hz)
-
Ambient temperature
40℃
(External site IPROS)
P97 (3.0kw)
pump unit / vacuum pump unit
- Product Summary
- It is used as a vacuum generating device for wafer vacuum chuck of dicing machine, and it consists of water sealing pump, control valve seal water flow meter, vacuum pressure gauge, etc.
- Use
- Vacuum chuck for dicer
specification
-
Model
P97 (3.0kw)
-
Motor output
3.0kW(50Hz)/3.45kW(60Hz)
-
Ultimate pressure
3.3kPa
-
Exhaust speed
78㎥/h(50Hz)/92㎥/h(60Hz)at40kPa
-
Port size
Φ38.1mm (Rc11 / 2 inch) IN · OUT both
-
Water supply amount
4.67L/min (maximum supply pressure 1.1MPa)
-
weight
About 60kg
-
External dimensions
D556×H236×W225
-
Noise levels
66dB/71dB (50/60Hz)
-
Power-supply voltage
185 ~ 220V 3-phase Δ connection
-
Rated current
14.5A/14.5A (50/60Hz)
-
Ambient temperature
40℃