Ultrapure water heating unit
Ultrapure water heating unit HDW-III
Control of temperature and fluid / Ultrapure water heating unit
- Product Summary
- It is a unit that can efficiently warm ultrapure water by using carbon heater and adopt long life heaters.
- Use
- Si wafer, GaAs wafer cleaning, liquid crystal display cleaning, mask cleaning, cleaning of hard disk substrate.
specification
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Model
HDW-III Series 4 Models
(-12N, -18N, -24N, -36N) -
Standard flow rate ※
12L/min～38L/min
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Maxium set temparature ※
85℃
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Power supply
(Heater)※3 Phase AC200V 150A～225A
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Power supply
(Control)Single-phase AC200V 5A
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Number of heaters ※
2～6
※ It depends on model