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High-pressure pump

SSBL series FSBL50 KPW series KPM-40B KPM-5030

SSBL series

SSBL series
pump unit / high-pressure pump

Product Summary: Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.

Use: Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning

specification

Model

SSBL series
Discharge pressure

SSBL-20 : 0.98～9.8MPa
SSBL-30 : 1.47～14.7MPa
SSBL-37.5 : 1.76～17.6MPa
The discharge flow rate

SSBL-20 : 1.13L/min
SSBL-30 : 0.71L/min
SSBL-37.5 : 0.58L/min

Driving air pressure

0.05～0.5MPa
Air consumption

About 70L (when the pump stroke number 60SPM)
Wetted seal

Pure water, IPA · · · FKM
NMP · · · Kalrez

Catalog PDF documents
(External site IPROS)

FSBL50

FSBL50
pump unit / high-pressure pump unit

Product Summary: Available for explosion-proof areas because electricity is not used with air driven plunger pumps Ideal for incorporating lift-off devices, etc.s

Use: Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning

specification

Model

FSBL-50
Discharge pressure

2.5~25Mpa
Doschage flow rate

1.68L/min
NMP

Kalrez

Driving air pressure

0.05~0.5Mpa
Pilot sir pressure

0.3~0.5Mpa
Wetted seal　Pure water,IPA

FKM

Catalog PDF documents
(External site IPROS)

KPW series

KPW series
pump unit / high-pressure pump unit

Product Summary: High-pressure water generating unit with built-in air driven plunger pump. Air pressure regulator, air pressure gauge, discharge pressure gauge, etc. are united and suitable for incorporation into equipment

Use: Used for IPA cleaning of wafers and detachment by solvent for high pressure jet cleaning

specification

Model

KPW series
Discharge pressure

KPW-20 : 0.98～9.8MPa
KPW-30 : 1.47～14.7MPa
KPW-37.5 : 1.76～17.6MPa
The discharge flow rate

KPW-20 : 1.13L/min
KPW-30 : 0.71L/min
KPW-37.5 : 0.58L/min

Driving air pressure

0.05～0.5MPa
Air consumption

About 70L (when the pump stroke number 60SPM)
Wetted seal

Pure water, IPA · · · FKM
NMP · · · Kalrez

Catalog PDF documents
(External site IPROS)

KPM-40B

KPM-40B
pump unit / high pressure pump unit

Product Summary: Two different outputs of independent pressure can be discharged at the same time. Dicing and deburring of CSP etc. can be done with one unit. Discharge operations are performed independently by external signals.

Use: Dicing and deburring of CSP etc.

specification

Model

KPM-40B
Discharge pressure

No1 4MPa 12L/min
No2 2MPa 3L/min
The discharge flow rate

Fixed at shipment Regarding discharge pressure and flow rate, we will adjust according to customer's request, so please consult us.

External dimensions

W470*D800*H370
weight

110kg

Catalog PDF documents
(External site IPROS)

KPM-5030

KPM-5030
pump unit / high pressure pump unit

Product Summary: The pump and the motor are arranged vertically to reduce the floor area.The flow rate characteristics can be varied by incorporating the inverter. It can be operated and stopped by an external signal.

Use: Cleaning of polished wafer

specification

Model

KPM-5030
The discharge flow rate

33.5L/min､ 5MPa
Pure water specifications pressure

0.3～0.4MPa
Supply air

0.4～0.7MPa

Alarm function

Supply water pressure decreases
the inverter output abnormality
External dimensions

W598*D548*H1224
weight

150kg

Catalog PDF documents
(External site IPROS)